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Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy

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arxiv 2111.06746 v1 pith:WGKBJLFS submitted 2021-11-12 cond-mat.mtrl-sci physics.ins-det

Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy

Pengfei Nan , Zhiyao Liang , Yue Zhang , Yangrui Liu , Dongsheng Song , Binghui Ge This is my paper
classification cond-mat.mtrl-sci physics.ins-det
keywords thicknessscanningelectronimagingmicroscopytransmissiondeterminingfast
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Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging, for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for determining thickness in scanning transmission electron microscopy (STEM) mode based on scanning moir\'e fringe (SMF). Sample thickness can be determined in situ in the medium magnification using focal-series SMF imaging, with beam damage and contamination avoided to a large extent. This method provides a fast and convenient way for determining thickness in TEM imaging, which is particularly useful for beam-sensitive materials such as Metal-Organic Frameworks.

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