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Minimal resonator loss for circuit quantum electrodynamics

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arxiv 1005.0408 v1 pith:EJSYKTKK submitted 2010-05-03 cond-mat.mes-hall cond-mat.supr-con

Minimal resonator loss for circuit quantum electrodynamics

classification cond-mat.mes-hall cond-mat.supr-con
keywords dielectriclossnbtincircuitcomparisondemonstratedelectrodynamicsfactors
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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Single photon level quality factors of 500x10^3 are shown in NbTiN superconducting resonators at millikelvin temperatures. This result originates from the intrinsic low dielectric loss of NbTiN, as demonstrated by comparison with Ta, and by removing unnecessary parts of the dielectric substrate.

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