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arxiv: 1907.08012 · v2 · pith:KK3EADUHnew · submitted 2019-07-18 · ⚛️ physics.app-ph

Manufacturable 300mm platform solution for Field-Free Switching SOT-MRAM

classification ⚛️ physics.app-ph
keywords switchingconceptfield-freesot-mramwaferacrossallowsarea
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We propose a field-free switching SOT-MRAM concept that is integration friendly and allows for separate optimization of the field component and SOT/MTJ stack properties. We demonstrate it on a 300 mm wafer, using CMOS-compatible processes, and we show that device performances are similar to our standard SOT-MTJ cells: reliable sub-ns switching with low writing power across the 300mm wafer. Our concept/design opens a new area for MRAM (SOT, STT and VCMA) technology development.

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