Monolithic integration of piezo-optomechanical photonic circuits with CMOS electronics on 200 mm wafers, demonstrated via PDACs for digital control of phase shifters, MZIs, and ring resonators.
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physics.optics 1years
2026 1verdicts
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Monolithic Integration of Piezo-Optomechanical Photonics and CMOS Electronics
Monolithic integration of piezo-optomechanical photonic circuits with CMOS electronics on 200 mm wafers, demonstrated via PDACs for digital control of phase shifters, MZIs, and ring resonators.