SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.
Electromagnetic field generated by an off-axis source in a cylindrically layered medium with an arbitrary number of horizontal discontinuities
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Spectral Numerical Mode Matching Method for 3D Layered Multi-Region Structures
SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.